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The tapeout project, geared toward advancing 3nm chip design, was completed using extreme ultraviolet (EUV) and 193 immersion (193i) lithography-oriented design rules and the Cadence® Innovus™ Implementation System and Genus™ Synthesis Solution. Imec utilized a common industry 64-bit CPU for the test chip with a custom 3nm standard cell library and a TRIM metal flow, where the routing pitch was reduced to 21nm. Together, Cadence and imec have enabled the 3nm implementation flow to be fully validated in preparation for next-generation design innovation.
The Cadence Innovus Implementation System is a massively parallel physical implementation system that enables engineers to deliver high-quality designs with optimal power, performance and area (PPA) targets while accelerating time to market. The Cadence Genus Synthesis Solution is a next-generation, high-capacity RTL synthesis and physical synthesis engine that addresses the latest FinFET process node requirements, improving RTL designer productivity by up to 10X.